Mks Astron 2l Manual -

Check for restricted water flow, high inlet water temperature (>30°C), or failure of the internal cooling loop.

The Astron 2L uses a 9-pin D-sub connector for the gauge. According to the official manual:

Indicates potential fouling of the discharge tube. Replace the tube if necessary.

) into highly reactive atomic fluorine radicals. These radicals are then directed downstream into deposition (CVD) and etch chambers to clean process build-up without causing the ion bombardment damage associated with in situ RF plasma. mks astron 2l manual

: MKS recommends against unauthorized modifications. Critical components like plasma blocks and electronic circuit boards (Power, Control, Ignition) should be serviced via the MKS Refurbishment Program . Purchasing and Availability

: Features a compact aluminum plasma channel and is often integrated with Applied Materials (AMAT) or Novellus systems. The University of Arizona Maintenance and Safety

The is a remote plasma source (RPS) primarily used as an atomic fluorine generator for semiconductor manufacturing processes like chamber cleaning and etching. Check for restricted water flow, high inlet water

The manual’s last section often references product evolution. MKS now recommends the or MicroPirani 925 for newer systems. However, the Astron 2L remains popular for legacy systems due to its low cost and simple analog output.

The ASTRON 2L operates under a straightforward, automated sequence. A. Startup/Ignition Ensure water flow (2.0 gpm) is stable. Ignition Gas: Introduce Argon (Ar) to fill the chamber.

. It generates high fluxes of reactive gas-phase radicals (like atomic fluorine from cap N cap F sub 3 ) to remove residues from chamber walls Replace the tube if necessary

: Requires 3-phase power (typically 180 to 228 VAC, 50/60 Hz). : Water cooling is mandatory. Maintain a minimum flow of during operation and when idle. Inlet water temperature must not exceed Interfacing

Always adhere to safety protocols when dealing with electrical equipment or systems involving hazardous gases. Key points include:

Before plugging in or operating your power supply, please read and adhere to the following safety protocols to prevent personal injury or equipment damage. Environmental Placement

Continue with Argon or Nitrogen purge to clear residual radicals from the plasma generator and lines. Turn off Power: Shut down the microwave power supply. 5. Troubleshooting and Maintenance Common issues often relate to gas flow or water cooling.

When atomic fluorine etches silicon residues inside a chamber, it forms Silicon Tetrafluoride ( SiF4SiF sub 4